JPH0214198Y2 - - Google Patents

Info

Publication number
JPH0214198Y2
JPH0214198Y2 JP1861981U JP1861981U JPH0214198Y2 JP H0214198 Y2 JPH0214198 Y2 JP H0214198Y2 JP 1861981 U JP1861981 U JP 1861981U JP 1861981 U JP1861981 U JP 1861981U JP H0214198 Y2 JPH0214198 Y2 JP H0214198Y2
Authority
JP
Japan
Prior art keywords
valve body
introduction hole
shaft
guide tube
exposure chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1861981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS57132442U (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1861981U priority Critical patent/JPH0214198Y2/ja
Publication of JPS57132442U publication Critical patent/JPS57132442U/ja
Application granted granted Critical
Publication of JPH0214198Y2 publication Critical patent/JPH0214198Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1861981U 1981-02-12 1981-02-12 Expired JPH0214198Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1861981U JPH0214198Y2 (en]) 1981-02-12 1981-02-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1861981U JPH0214198Y2 (en]) 1981-02-12 1981-02-12

Publications (2)

Publication Number Publication Date
JPS57132442U JPS57132442U (en]) 1982-08-18
JPH0214198Y2 true JPH0214198Y2 (en]) 1990-04-18

Family

ID=29816579

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1861981U Expired JPH0214198Y2 (en]) 1981-02-12 1981-02-12

Country Status (1)

Country Link
JP (1) JPH0214198Y2 (en])

Also Published As

Publication number Publication date
JPS57132442U (en]) 1982-08-18

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